Tiger Optics Unveils Lasertrace 3x for Semiconductor Industry
August 16, 2012
DEVICE MONITORS MOISTURE LEVELS IN LOW-TEMPERATURE EPI DEPOSITION
Warrington, PA (August 16, 2012) – Tiger Optics LLC today introduced its LaserTrace 3xTM analyzer for advanced chipmakers requiring heightened monitoring of moisture, a contaminant and source of oxygen that interferes with deposition processes. Tiger’s new moisture analyzer permits process engineers to simultaneously monitor as many as four process chambers at pressures below 50 torr. Operated by a single electronic module, the LaserTrace 3x is an exceptionally efficient device that also saves money and precious space in the cleanroom environment.