Tiger Optics Hails Selection of CRDS for New Industry Standard

Warrington, PA (August 20, 2013) – As laser-based methods achieve greater acceptance, they are replacing incumbent methods as standards in a host of industries. Tiger Optics LLC today said it was honored to participate in the process tied to the revision of a key semiconductor industry standard for monitoring moisture dry-down characteristics of gas delivery systems. The new SEMI F112 standard, published last month by Semiconductor Equipment and Material International (SEMI), identifies Cavity Ring-Down Spectroscopy (CRDS) as the technique for users to qualitatively assess and rank gas delivery systems of different designs. In so doing, CRDS replaces Atmospheric Pressure Ionization Mass Spectrometry (APIMS) as the trace-level moisture detector prescribed for this test method.