High-Purity Gases & Systems
Applications
Based upon Tiger’s performance, the SEMI F-112 standard calls out CRDS as the technology of choice in determining moisture dry-down characteristics of high-purity gas systems. To check incoming or point-of-use quality, Tiger’s CRDS analyzers monitor for O2, H2O, CH4, CO, CO2 and more down to parts-per-billion (ppb) and even parts-per-trillion (ppt) levels. Special low pressure (LP) versions of the HALO and LaserTrace lines monitor for impurities in hydrides, including arsine, phosphine and ammonia.
The high potential for atmospheric leaks during cylinder and truck fill, as well as in gas delivery, storage and distribution systems, drives the requirement for continuous on-site production monitoring at the world’s leading semiconductor fabs. Typically, H2, N2, Ar, He and O2 are monitored for trace H2O, O2 and CH4 contamination. Other contaminants that may be monitored are CO, CO2, and acid gases.
The recent addition of air and CDA to the measurement list addresses the latest Lithography requirements. For qualifying new gas lines and welds, dry Ar and N2 are typically used. To ensure gas quality throughout the fab, monitoring is also performed at gas cylinders, in addition to the lines following a cylinder exchange and at purifiers to verify their functionality.
Select applications include:
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| Bulk Gas & Methane | Specialty Gas | High Quality Piping Qualification |
Overview of analyzers for analysis in bulk gases
Overview of analyzers for analysis in specialty gases (NH3, PH3, AsH3)
